uniformity of thickness distribution 厚度分布均匀性
uniformity of film thickness 膜厚均匀性
Uniformity of layer thickness 厚度均匀性
uniformity of the film thickness 膜厚均匀性
thickness uniformity of films 薄膜的厚度均匀性
With large size wafer, the uniformity of thickness & Resistivity was out of control line.
主要是随着衬底尺寸的增长，外延层的厚度、电阻率均匀性无法满足要求。
The change of heat treatment had no obvious effect on the uniformity of thickness, which was detected by the composition structure of the films.
固溶工艺的改变对阳极氧化膜的厚度均匀性无显著影响，氧化膜自身的成分结构决定了其膜层厚度的均匀性。
The calculated results of an example checks very well with the experimental results shown that the consideration of the non-uniformity of thickness and the geometrical nonlinearity is necessary.
算例与已有的实验相吻合，它表明，考虑变厚度和几何非线性因素很有必要。
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